PIEZO-PZT-2026-005
PZT-5H disk — resonant piezoelectric spectroscopy (RPS/RUS)
Identity
| Sample ID | PIEZO-PZT-2026-005 |
| Title | PZT-5H disk — resonant piezoelectric spectroscopy (RPS/RUS) |
| Status | Completed |
| Operator | Dr. K. Polat |
| Laboratory / Facility | Acoustic / Piezo Characterization Lab |
Substrate / Material
| Substrate Material | Free-standing disk (Ø10 × 1 mm) |
| Active Layer Material | PZT-5H (lead zirconate titanate) ceramic |
Notes
| Tags | piezoelectric, RPS, RUS, resonance, elastic modulus, d33 |
| Notes | Resonant ultrasonic spectroscopy + inverse elastic-tensor fit (Visscher solver). |
Process Steps
Sample and electrode (Materials / Recipe)
| Material / Composition | Quantity | Unit | Brand | Model | Lot / Batch |
| PZT-5H disk | 1 | pcs | APC Int. | APC 855 | P-5521 |
| Ag electrode (fired) | 2 | faces | DuPont | QS171 | D-3380 |
Lock-in amplifier + furnace (Equipment / Instrument)
| Instrument Name | Lock-in + temperature controller |
| Model | Zurich MFLI + Eurotherm 3216 |
| Serial No | MFLI-22417 / EU-3216-08 |
| Location | Piezo lab, vibration isolation table |
| Calibration Date | 2026-10-01 |
| Settings | Sweep 50–600 kHz, 2000 points; drive 0.5 Vpp; TC=100 ms. |
| Reservation / User | Dr. K. Polat |
RPS frequency sweep (Measurement Context)
| Instrument | Zurich MFLI (voltage-input topology) |
| Calibration Status | Valid |
| Uncertainty (±) | ±0.1% frequency |
| Caption | Conductance/impedance peak family; first 8 modes identified (radial + thickness). |
Fundamental radial mode ≈ 210 kHz; thickness mode ≈ 2.0 MHz. Q≈420 from Lorentzian fit.
Extracted piezo/elastic parameters (Result (Spec))
| Parameter | Value | Uncertainty (±) | Unit | Specification | Pass |
| d₃₃ (relative) | 590 | 20 | pC/N | ≥550 | ✓ |
| Elastic modulus E (VRH) | 62 | 3 | GPa | — | ✓ |
| Shear modulus G | 23 | 1.5 | GPa | — | ✓ |
| Poisson's ratio ν | 0.31 | 0.02 | — | — | ✓ |
| Mechanical quality factor Q | 420 | 30 | — | ≥300 | ✓ |
Full Cᵢⱼ extracted via inverse elastic-tensor NLLS fit; Zener anisotropy ≈ 1.4.
Method reference (RUS) (Reference / Citation)
| Authors | Migliori A., Sarrao J. L. |
| Title | Resonant Ultrasound Spectroscopy |
| Journal / Publication | Wiley (book) |
| Year | 1997 |
| Relevance / Note | Basis of the Visscher forward eigensolver and inverse elastic-tensor fit method. |